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Semiconductor Sensors

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An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

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Semiconductor Sensors, Simon M. Sze

Sprache
Erscheinungsdatum
1994
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(Hardcover)
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Titel
Semiconductor Sensors
Sprache
Englisch
Autor*innen
Simon M. Sze
Erscheinungsdatum
1994
Einband
Hardcover
Seitenzahl
576
ISBN10
0471546097
ISBN13
9780471546092
Reihe
Bewertung
5 von 5 Sternen
Beschreibung
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.