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An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
Buchkauf
Semiconductor Sensors, Simon M. Sze
- Sprache
- Erscheinungsdatum
- 1994
- Einband
- (Hardcover)
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- Titel
- Semiconductor Sensors
- Sprache
- Englisch
- Autor*innen
- Simon M. Sze
- Verlag
- Wiley-Interscience
- Erscheinungsdatum
- 1994
- Einband
- Hardcover
- Seitenzahl
- 576
- ISBN10
- 0471546097
- ISBN13
- 9780471546092
- Reihe
- Kategorien
- Schlagwörter
- Naturwissenschaften, Wissenschaft, USA, Technologie, Elektronik, Halbleiter
- Bewertung
- 5 von 5 Sternen
- Beschreibung
- An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.