Microsystem Technology and Microrobotics

Focusing on the integration of nanometer-scale components, this book offers a foundational introduction to microsystem technology (MST) for students, engineers, and scientists. It covers essential topics such as microfabrication, microactuators, and microsensors, along with the development and testing of microsystems. Additionally, it reviews existing products and experimental innovations, providing a thorough overview of advancements in MST devices and robotics, showcasing their applications across various fields like medical and automotive industries.