Computer Simulation of Ion-Solid Interactions

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Focusing on the investigation of ion bombardment of solids through computer simulation, the book explores the fundamental physics and structure of simulation programs. It delves into key topics such as backscattering, sputtering, and implantation of atomic particles across a wide energy range. The author discusses two main models: the binary collision and classical dynamics, along with interaction potentials and electronic energy losses. An extensive literature overview makes this work valuable for both active researchers and students new to the field.