Electron-Beam Interactions with Solids

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Focusing on the fundamental role of electron beam interactions with solid targets, this book delves into theoretical investigations using the Monte Carlo method to simulate electron penetration. It explores probabilistic laws governing elastic and inelastic cross-sections and examines various aspects such as backscattering coefficients, absorption, and secondary electron emission. By comparing theoretical insights, computational simulations, and experimental data, the book aims to provide a comprehensive understanding of interaction processes in materials science.