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Precision Nanometrology

Sensors and Measuring Systems for Nanomanufacturing

Autor*innen

Wei Gao

Parameter

372 Seiten
14 Lesestunden

Natur
Natur, Tiere

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Focusing on the latest advancements in optical sensors, the book explores their application in precision nanometrology for measuring angle and displacement. It details scanning-type measuring systems designed for analyzing surface forms and stage motions, complemented by algorithms and experimental data that enhance understanding and implementation.