Modeling Methods for CMOS MEMS Speaker

Focusing on the modeling of a micro electro-mechanical system, this thesis explores an inversely driven silicone microphone utilizing capacitive transducer techniques. The microphone functions like an electrostatic loudspeaker and requires an array configuration for enhanced sound pressure levels and digital sound reconstruction. It employs the finite element method to model electrostatic forces and membrane deformation, while also addressing acoustic wave propagation through both finite element analysis and the Kirchhoff-Helmholtz integral, offering a novel approach for open domain acoustic problems.